Repairs
Assemblies and sub-assemblies, components and PCB's
Major components and all other parts. Slit doors, shuttle assemblies, cassette nest, pneumatic and RF matches.
List of other repair items
Aspen II Arms
The Mattson Robot arm will be fully refurbished, aligned and tested ready for installation in the tool.
All bearings and screws are renewed
Aspen II Robots
The main Mattson robot can be repaired in 3 scenarios. Full refurbishment, customer specific refurbishment and repair of consumables.
Throttle valves
Throttle valves come in 2 halves. The top and the bottom assemblies. Either top / bottom or combined can be refurbished. Tested with Helium leak detected for internal & external leaks and with the full range of motion.