|
|
Part number
|
Description
|
Qty. on stock
|
|
237235
|
VatValve o ring
|
2
|
|
1006583
|
Sgassket ,w-seal,1-1/8inch
|
38
|
|
1007221
|
O ring,2.1ID x 0.21CS KZ9100
|
0
|
|
02SPX
|
Shuttle lift gear box
|
0
|
|
040-00027-00
|
Shaft
|
2
|
|
040-00035-00
|
FLANGE
|
1
|
|
040-00067-00
|
CAM,GENEVA EXT
|
3
|
|
040-00083-00
|
GEAR
|
1
|
|
040-00096-00
|
BUMPER,.31 OD, ALUM
|
6
|
|
041-00047-00
|
SPRING
|
17
|
|
042-00012-00RW
|
GEN,RF,1KW,13.56 MHZ REWORKED
|
0
|
|
050-90000-00
|
PCB ASSY, 3-GAS GAS BOX
|
1
|
|
053-00027-00
|
SHAFT
|
8
|
|
062-00002-00
|
STANDOFF,HEATER
|
1
|
|
062-00003-00
|
Pin Heater
|
63
|
|
062-00005-00
|
BUSHING,CERAMIC
|
1
|
|
062-00014-00
|
Coupling lift pin
|
2
|
|
062-00016-00
|
FLag
|
1
|
|
062-00023-00
|
STRAP,GROUND,HEATER
|
3
|
|
065-21000-00
|
PCB ASSY, STEP INDEXER PC-AT
|
1
|
|
100-00327-00
|
SILKSCREEN, CVR, PNEU, UPPER PRESSURE/TEMPERATURE, PANEL
|
1
|
|
100-00328-00
|
SILKSCREEN, CVR, PNEU, LOWER PRESSURE/TEMPERATURE, PANEL
|
1
|
|
JCV 120V
|
Lamps
|
52
|
|
1013208
|
EZ zone controller
|
0
|
|
140-00026-00
|
BRKT,ROBOT,SHIPPING
|
1
|
|
141-00003-00
|
HOUSING,LEAD SCREW
|
1
|
|
141-00004-00
|
HOUSING,BEARING
|
1
|
|
141-00034-00
|
Bracket, cross member, shuttle
|
1
|
|
141-00059-00
|
Brkt 100 (six inch cassette nest holder
|
4
|
|
141-01000-00
|
FEED THROUGH ASY,ELECTRIC VAC
|
2
|
|
143-00004-00
|
O-RING, SPLICED,LOADLOCK
|
1
|
|
144-00003-00
|
WINDOW,PROCESS CHMBR,PYREX A2
|
4
|
|
144-00006-00
|
TUBE,PROTECT,FEED THROUGH
|
35
|
|
144-00007-00
|
WSHR,PROCESS CHAMBER,ALUMINA
|
7
|
|
144-00010-00
|
CHAMBER,1-PIECE STRIP PROCESS
|
1
|
|
144-01000-00
|
Feed through, vacuum electrical
|
1
|
|
146-93000-00
|
PCB ASSY, ANALOG FILTER
|
1
|
|
147-01000-00
|
PNEU ASSY,UPPER
|
1
|
|
147-02000-00
|
PNEU ASSY,LOWER
|
1
|
|
150-90000-00
|
PCB ASSY, 4-GAS GAS BOX
|
1
|
|
152-00004-00
|
ELBOW,PRESSURE SENSOR
|
1
|
|
152-00008-00
|
O-RING, SPLICED,CASSETTE CHMBR
|
3
|
|
152-00009-00
|
O-RING,SPLICED,SHUTTLE CHMBR
|
3
|
|
152-00016-00
|
STRIP, DELRIN O-RING HOLDER
|
5
|
|
152-00017-00
|
STRIP, DELRIN O-RING HOLDER
|
10
|
|
152-00018-00
|
STRIP,DELRIN BACK CHAMBER
|
5
|
|
161-00000-00
|
KIT, ASPEN II SKINS
|
1
|
|
162-00005-00
|
SUPPORT,HEATER
|
1
|
|
165-00090-00
|
PCB,64 DIGITAL I/O
|
7
|
|
180-21000-00
|
CBL ASY,#99,RBT IF TO DRV PWR
|
3
|
|
180-90000-00
|
PCB ASSY, ROBOT INTERFACE
|
1
|
|
181-90000-00
|
PCB ASSY, SHUTTLE #1
|
1
|
|
181-90000-old
|
PCB ASSY, SHUTTLE #1
|
9
|
|
181-91000-00
|
PCB ASSY, SHUTTLE #2
|
2
|
|
186-76006-00
|
Shaft, smif Conn
|
2
|
|
190-90000-00
|
PCB ASSY, WAFER SENSOR
|
2
|
|
199-01001-00
|
ADPTR,LDLOCK CHMBR
|
2
|
|
199-03005-00
|
BRKT
|
2
|
|
199-41000-00
|
ASSY, SIDE CHMBR STRIP SUB-FRAME
|
1
|
|
210-04979-00
|
Kit, rapid cass exchange
|
1
|
|
210-12734-00
|
KIT,SAPPHIRE WINDOW END PT
|
1
|
|
244-00020-00
|
TUBING,PRESSURE GAUGE
|
1
|
|
246-90000-00
|
PCB ASSY, TERMINAL PNL,MODEL
|
1
|
|
246-91000-00
|
PCB ASSY, PRIMARY INTERFACE, STRIP,CVD
|
2
|
|
246-94000-00
|
PCB ASSY, SECONDARY INTERFACE
|
1
|
|
255-00568-00
|
PCB ASSY, MOBL,FLEX,ROBOT INTRFC
|
1
|
|
255-02720-00
|
PCB ASSY, FARADAY SHLD DET
|
2
|
|
255-04088-00
|
PCB ASSY, SMIF INTRFC,JENOPTIK
|
2
|
|
255-06515-00
|
PCB ASSY,OPER INTRFC
|
1
|
|
255-06515-DF
|
PCB ASSY,OPER INTRFC
|
1
|
|
255-13390-00
|
PCB, Faraday Relay
|
1
|
|
255-19148-00
|
PCB ASSY, RLY FARADAY SHLD DETCR
|
2
|
|
255-23613-00
|
PCB ASSY,ANALOG FILTER BD,
|
1
|
|
258-00890-00
|
TUBE ASSY,SHOWER HEAD
|
2
|
|
258-02132-00
|
TUBE ASSY,CONN,FLTR TO MFC
|
27
|
|
258-02372-00
|
TUBE ASY,CONN,MALE-FEM
|
3
|
|
258-02387-00
|
TUBE ASY,CONN #9Longer
|
5
|
|
258-13890-00
|
FLANGE,PROCESS CHMBR,CVD
|
2
|
|
260-01100-00
|
ASPEN II SINGLE CHAMBER STRIPPER
|
1
|
|
260-01343-00
|
ASPEN II DUAL CHAMBER STRIPPER
|
0
|
|
262-00007-00
|
FLANGE,CERAMIC
|
1
|
|
263-00521-00
|
CBL ASSY,J-1,RBT INTFC
|
3
|
|
263-00528-00
|
CBL ASSY,37 PRIME IB TO RBT IB
|
1
|
|
263-00939-00
|
GAS BOX ASSY,ICP,REAR,5RA
|
1
|
|
263-02156-00
|
DC Motor Robot ext & rot
|
0
|
|
263-02156-01
|
DC Motor Robot ext & rot P36/P32 93:1
|
0
|
|
263-02689-00
|
Paddle/brkt/asy adjust strip
|
1
|
|
263-02741-00
|
CASS ROT ASSY,4",5",6"PLSTC,AGV
|
4
|
|
263-02940-00
|
PWR SPLY ASSY,DC
|
1
|
|
263-08726-00
|
SEAL HSG ASSY,LIFT DOOR
|
2
|
|
263-08738-00
|
SLIT DOOR ASSY,NEW DESIGN
|
0
|
|
263-15989-00
|
RADAY SHIELD DETCTOR ASSY,
|
1
|
|
263-20414-00
|
ASY,AC BOX,REMOTE,A2
|
0
|
|
299-20000-00
|
PCB ASY,ICP PLASMA SENSE,A2
|
1
|
|
240.67x5.33
|
Parker O rings
|
9
|
|
3001309
|
ASSY,SLIT DOOR,PM,LOWER
|
2
|
|
3002318
|
ASSY,CBL,STPR MOTOR CNTRL TO MOTOR BD,A2
|
1
|
|
3005689
|
PCB ASY,SC INTF BD,SINGLE BD,EFEM INTLKS
|
1
|
|
301-02361-00
|
COVER,PNEU CONT
|
1
|
|
301-08506-00
|
PLT,COIL,SPRT,INDEPENDT HD CTL
|
2
|
|
302-00254-00
|
Cover, Rot, Cylinder, painted agv
|
1
|
|
302-01639-00
|
Cover, cass, rotate, top
|
2
|
|
302-03553-00
|
CONN,CAP,VCR,BOLT-IN
|
1
|
|
302-06048-00
|
Cover LT Twr, #4 sst
|
0
|
|
302-06187-00
|
STRAP,CONN,CAPACITOR,SILVER PL
|
6
|
|
302-08852-00
|
STRAP,RF,INDEPENDENT HD CNTL
|
0
|
|
303-00605-00
|
NUT,HEX,7/8-20
|
3
|
|
303-01360-00
|
Water pipe connection
|
2
|
|
303-01363-00
|
PLUG,WATER FEEDTHRU,HSE PLATEN
|
0
|
|
303-01425-00
|
PADDLE,STRIP,ASPEN 2
|
3
|
|
303-01720-00
|
GUIDE RING 1.70 ALUM,ICP
|
2
|
|
303-02119-00
|
BRKT,MTG,NUPRO
|
12
|
|
303-02375-00
|
PLATE,MTG,MFC
|
4
|
|
303-02685-00
|
BRKt, Paddle
|
1
|
|
303-06250-00
|
GEAR,GENEVA
|
1
|
|
303-06251-00
|
DRIVER,GENEVA
|
1
|
|
303-06590-00
|
BUSHING
|
6
|
|
304-01359-00
|
PLUG,PLATEN,WATER COOLED
|
4
|
|
304-01359-00
|
PLUG,PLATEN,WATER COOLED
|
2
|
|
304-04714-00
|
GUIDE RING,QUARTZ,ICP
|
2
|
|
304-14526-00
|
BRUSH HOLDER
|
3
|
|
304-14527-00
|
HANDLE
|
3
|
|
305-00816-00
|
COUPLER,CLAMP HUB,MOD
|
9
|
|
400-01778-00
|
CYL,AIR,1/2 BORE,110MM ST
|
0
|
|
400-13711-00
|
CYL,AIR,COMPACT AIR
|
1
|
|
405-00548-10
|
Bearing 1.4375odx.7500is sst
|
2
|
|
405-00548-11
|
Bearing 1.562 5odx.8750id, sst
|
2
|
|
405-01164-00
|
BEARING,CRS RLR,SPLT OTR,W/SLS
|
2
|
|
405-01763-09
|
BALL,3/8 DIA,CHROME STL
|
4
|
|
405-02615-22
|
BALL PLGR,5/8-11,NYL BL,SST BD
|
7
|
|
425-01662-00
|
FILTER,WAVELENGTH,430 NM
|
4
|
|
450-02950-06
|
NUT,JAM,5/8-11 THRD,HEX,SS
|
4
|
|
456-00226-04
|
O-RING,0.468 ID X .078CS,VITON
|
9
|
|
456-00226-06
|
O-RING,1.859 ID X .139CS,VITON
|
6
|
|
456-00226-16
|
O-RING,0.612 ID X .103CS,VITON
|
6
|
|
456-00226-36
|
O-RING,2.734 ID X .139CS,VITON
|
8
|
|
456-00226-55
|
O-RING,1.225 ID X .210CS,VITON
|
2
|
|
456-00226-94
|
O-RING,.060 ID x .040CS,VITON
|
2
|
|
456-00608-00
|
GASKET,ALUM,2 1/2 FLANGE
|
6
|
|
456-01027-01
|
O-RING,7.975 ID X.210W,FLOROSI
|
11
|
|
456-01027-03
|
O-RING,23.2 ID X.210W,FLORO
|
5
|
|
456-01027-05
|
O-RING,16.955 ID X.210W,FLORO
|
2
|
|
456-01027-07
|
O-RING,1.475 ID X.210W,FLOROSI
|
40
|
|
456-01027-08
|
O-RING,.239 ID X .064W,FLOROSI
|
8
|
|
456-01027-09
|
O-RING,13.975 ID X .210W,FLORO
|
4
|
|
456-01027-11
|
O-RING, 1.046 ID X .139 W, FLORO
|
0
|
|
456-01027-26
|
O-RING 1.859 X .139 ISO VALVE
|
10
|
|
456-04229-01
|
O-RING,7.975 ID X .210W,PAROFL view port
|
3
|
|
456-04229-02
|
O-RING,7.725 ID X .210W,PAROFL. Tube
|
4
|
|
456-04229-07
|
O-RING,.737 IDX .103W,PAROFL
|
3
|
|
456-04229-09
|
O-RING,1.225 ID X .210W PAROFL
|
4
|
|
456-04229-11
|
O-RING,.239 ID X .064W PAROFL
|
4
|
|
456-04229-11
|
O-RING,.239 ID X .064W PAROFL
|
6
|
|
456-05784-02
|
O-RING,27.80 ID X .210CS,FLORO
|
2
|
|
456-08727-01
|
SEAL,QUAD,1.174IDx.103,VITON
|
10
|
|
456-08727-02
|
SEAL,QUAD,1.975IDx.210,VITON
|
4
|
|
456-09062-00
|
SEAL,HSG MOUNTED,UNLUBRICATED
|
18
|
|
456-09610-02
|
O-RING,7.725ID,.210CS,60DUR,FL
|
9
|
|
456-13453-00
|
O-RING,13.975ID X .210W, PARO
|
1
|
|
456-15180-04
|
O-RING,1.734ID X .139W c
|
1
|
|
456-15180-05
|
O-RING,3.359ID X .139W KZ8375 Pump manifold
|
2
|
|
456-15180-06
|
O-RING,3.609ID X .139W KZ8375 sapphire window
|
4
|
|
456-15181-08
|
O-RING,22.94ID X .210W KZ8375 Chamber
|
1
|
|
456-15181-09
|
O-RING,16.955ID X .210W KZ8375 adaptor plate
|
1
|
|
456-15181-10
|
O-RING,7.975ID X .210W KZ8375 view port
|
1
|
|
456-15181-11
|
O-RING,1.225ID X .210W KZ8375
|
5
|
|
456-15181-12
|
O-RING,2.100ID X .210W,KZ8375 KF50
|
6
|
|
456-15196-01
|
O-RING,.426ID X .07W c
|
2
|
|
456-15271-01
|
O-RING,.239ID X .064W,KZ8375
|
5
|
|
475-01371-02
|
SCREW,RDH,SLOT,8-32 X 3/4,AL
|
10
|
|
475-01374-01
|
SCREW,SCHD,4-40 X 1/4,MONEL
|
4
|
|
475-01374-03
|
SCREW,SCHD,4-40 X 3/8,MONEL
|
0
|
|
475-01375-01
|
SCREW,FLH,PHH,4-40 X 1/4,MONEL
|
10
|
|
487-02221-00
|
FTG,RDCR,1/4,5/32 OD,PLUG-IN
|
28
|
|
491-01647-00
|
ADPTR,STR SECT,NW50,5.51 LG
|
2
|
|
505-04147-00
|
FAN,AC,115V,112CFM
|
3
|
|
510-08660-00
|
Cap, vac, 100pf
|
1
|
|
510-18633-00
|
CAP,CVO5C,125H/8
|
0
|
|
513-05527-00
|
Plug 250cv ac 20a straight blade
|
3
|
|
513-05528-00
|
Recpt 250v ac 20a straight blade
|
3
|
|
514-02755-00
|
Thermo bimetal 180 degrees
|
4
|
|
514-20787-00
|
CONT,OVER TEMP LIMIT SWITCH
|
0
|
|
520-04612-00
|
DRIVE,STEPPER MOTOR,OEM 750
|
6
|
|
525-00332-00
|
FUSE,7.5 AMP,FNQ TYPE
|
36
|
|
525-01601-00
|
FUSE,2A,250VAC,3AG,SLO-BLO,313
|
0
|
|
529-00471-00RW
|
GEN,3KW,13.56MHZ,REWORKED
|
0
|
|
529-00472-00RW
|
GEN,1KW,LOW FREQ,REWORKED
|
0
|
|
544-00013-00
|
CVR, LT, Det
|
1
|
|
544-00015-00
|
GUIDE
|
6
|
|
544-00023-00
|
CAP,QUARTZ TUBE
|
2
|
|
544-00026-00
|
COIL
|
2
|
|
544-00027-00
|
TOP PLATE
|
1
|
|
544-00032-05
|
BRKT,COIL SUPPORT
|
1
|
|
544-00032-07
|
BRKT,COIL SUPPORT
|
2
|
|
544-00032-08
|
BRKT,COIL SUPPORT
|
2
|
|
544-00034-00
|
SHLD,FARADAY
|
2
|
|
551-13578-00
|
MOTOR,GEAR SHUTTLE LIFT
|
3
|
|
553-21146-00
|
BIAS MATCH RFS 1017 W/DRIP PAN
|
2
|
|
579-00733-00
|
SNSR,MAGNETIC,HERMTCLY SEALD
|
4
|
|
579-06056-00
|
SWITCH,PUSHBTN,N/O,3/4A,125V
|
3
|
|
579-19657-00
|
CONTACTOR,3POLE,65AMP
|
0
|
|
03-2z
|
Bearing RF gap motor big
|
6
|
|
04-2z
|
Bearing RF gap motor small
|
6
|
|
635-02946-00
|
LUBRICANT,ISOFLEX NCA 15
|
5
|
|
80032
|
Tight pocket TC
|
4
|
|
800-00570-00
|
Kit, Robot
|
2
|
|
910-10021-00
|
BEARING,.250X.750X.218
|
4
|
|
910-10022-00
|
Bearing 393x1.0236x.315 pairs
|
8
|
|
910-10024-00
|
BEARING,1.0625X1.500X.281
|
5
|
|
910-10026-00
|
BEARING,.625X1.0625X.281
|
2
|
|
910-10028-00
|
BEARING,1.000X1.375X.1875
|
6
|
|
910-10029-00
|
BEARING,1.500X1.875X.1875
|
3
|
|
910-10032-00
|
BEARING,.1875X.500X.1562
|
4
|
|
911-10005-00
|
GEAR,0.625 PD,6MM BORE
|
1
|
|
912-12003-00
|
SPACER,SHAFT,.250X.375X.031
|
1
|
|
913-10005-00
|
O-RING,1.610 ID X .139CS
|
1
|
|
913-10025-00
|
O-RING,1/16 TUBE OD,VITON
|
12
|
|
913-10026-00
|
O-RING,1/4 TUBE OD,VITON
|
6
|
|
913-10027-00
|
O-RING,3/8 TUBE OD,VITON
|
10
|
|
913-10028-00
|
O-RING,0.613 ID X .103CS,VITON
|
1
|
|
913-10029-00
|
O-RING,1.296 ID X .139CS,VITON
|
7
|
|
913-10030-00
|
O-RING,1.049 ID X .103CS,VITON
|
10
|
|
913-10031-00
|
O-RING,1.987 ID X .103CS,VITON
|
6
|
|
913-10033-00
|
O-RING,4.475 ID X .210CS
|
1
|
|
913-10035-00
|
O-RING,1.475 ID, .210CS
|
6
|
|
913-10038-00
|
O-RING,16.955 ID X .210CS
|
8
|
|
913-10040-00
|
O-RING,3.359 ID X .139CS
|
1
|
|
913-10042-00
|
O-RING,0.364 ID X .070CS
|
15
|
|
913-10043-00
|
O-RING,1.046 ID X .139CS
|
1
|
|
913-10044-00
|
O-RING,1.734 ID X .139CS
|
10
|
|
913-10046-00
|
O-RING,13.975 ID X .210CS,VITN
|
6
|
|
913-10047-00
|
O-RING,0.799 ID X .103CS
|
7
|
|
913-10048-00
|
O-RING,2.734 ID X .139CS
|
5
|
|
913-10053-00
|
O-RING,18.955 ID X .210CS,SILC
|
9
|
|
913-10054-00
|
O-RING,13.975 ID X .210CS,VITN
|
2
|
|
913-10054-00
|
O-RING,13.975 ID X .210CS,VITN
|
1
|
|
913-10058-00
|
O-RING,3.734 ID X .139CS
|
1
|
|
913-10066-00
|
O-RING,0.176 ID X .050CS
|
44
|
|
913-11001-00
|
SEAL,LIP,FLANGED 1.125 DIA
|
1
|
|
913-11002-00
|
SEAL,LIP,2.00 ID X 2.375 OD
|
2
|
|
913-11003-00
|
SEAL,1.25 ID X 1.50 OD
|
3
|
|
913-12003-00
|
ROD T-SEAL,1 3/16 ID
|
3
|
|
913-12004-00
|
ROD T-SEAL,9/16 c
|
3
|
|
9133-10033-00
|
O-RING,4.475 ID X .210CS Robot top
|
3
|
|
914-11001-VAT
|
Vat Valve throttle valve
|
5
|
|
914-12005-00
|
CLAMP,NW50 ISO-KF
|
8
|
|
914-12014-00
|
SEAL,CENTER,RING,c
|
1
|
|
914-14002-00
|
SWITCH,PRES
|
0
|
|
914-15046-00
|
SCREEN,FAN
|
4
|
|
914-18004-00
|
CYL,PNEU,1 1/8B X 5S
|
0
|
|
914-19002-00
|
VALVE,MECH,3 WAY/3 PORT,BLK
|
0
|
|
914-91002-00
|
FILTER,WAFERGARD MINI IN LINE
|
4
|
|
916-10006-00
|
MINICONVECTRON 275,VCR
|
1
|
|
916-11002-00
|
CERAMIC,THERMOCOUPLE PROTECT
|
7
|
|
916-11002-00
|
CERAMIC,THERMOCOUPLE PROTECT
|
5
|
|
931-15001-00
|
SSR,25 AMP,3-32 VDC/120 VAC
|
3
|
|
932-18006-00
|
Switch keypad .075 centers
|
1
|
|
932-18020-00
|
On button
|
3
|
|
932-22011-00
|
FUSE,20 AMP,KTK TYPE
|
16
|
|
932-22012-00
|
FUSE,2 1/2 AMP,FNQ TYPE
|
32
|
|
933-14005-00
|
MOTOR,DC,SHUTTLE ROTATE
|
3
|
|
933-14009-00
|
MOTOR,STEPPER,ROBOT
|
1
|
|
933-17001-00
|
BRAKE,ROBOT
|
6
|
|
934-17003-00
|
PCB,PC-AT,STEPPER MOTOR DRIV
|
1
|
|
934-18012-00
|
CABLE,RETRACT,6 COND,15",01"
|
1
|
|
934-18015-00
|
POWER STRIP,12 OUTLT,12FT,RK MT
|
1
|
|
999-11001-00
|
LUBRICANT,SEALS & VACUUM 109
|
6
|
|
CVD Chamber O-ring
|
|
2
|
|
GD760S165T
|
ICPsm air caps mod
|
6
|
|
Helium leak detector
|
Leybold UL 100 Plus Helium Leak Detector
|
1
|
|
HU232.19.24
|
Throttle valve coupling
|
4
|
|
JVT- Test Bench
|
Robot Test bench
|
1
|
|
K00011-8900
|
Kalrez O rings
|
150
|
|
K00118-4079
|
Kalrez O rings
|
50
|
|
K00120-4079
|
Kalrez O rings
|
13
|
|
KF50 O ring
|
|
3
|
|
KK
|
Brushes for RF gap motor
|
10
|
|
MSPLP10665
|
Varian scroll pump
|
1
|
|
No number
|
PC BACKING C
|
3
|
|
Patlite buzzer
|
Buzzer
|
1
|
|
Slit door + Chamber
|
|
1
|
|
SPECIAL
|
GAS BOX CONNECTOR
|
1
|
|
Vat-PS
|
Vat power supply
|
9
|
|
|
Nupro
|
0
|
|
|
8 inch cassette plates
|
2
|
|
|
Cassette platform fixed
|
2
|
|
